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Proceedings Paper

An investigation of polymer-carbon black composite gas detectors
Author(s): Xiaoxiang Sun; Haifen Xie; Qiudong Yang; Yiping Huang
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Paper Abstract

In this paper, we describe the development of novel chemical gas sensors. These sensors consist of sensitive films and interdigited microelectrodes. The sensitive films are made of insulating polymers mixed with conducting carbon black. Interdigitated microelectrodes made of gold are fabricated on the silicon by VLSI technology and packaged. With the deposition of different polymer films on the interdigitated electrodes, we can make various polymer-carbon black composites chemresistive gas microsensors. When the sensitive films are exposed to organic gases, these films will absorb the gases and swell, that is, the resistance of the films goes to increase. We test two kinds of microsensors exposed in the same concentrations of organic gases. By principle component analysis of responses of microsensors, it is clear that two kinds of the same concentration different gases can be easily discriminated.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607908
Show Author Affiliations
Xiaoxiang Sun, Fudan Univ. (China)
Haifen Xie, Fudan Univ. (China)
East China Univ. of Science and Technology (China)
Qiudong Yang, Fudan Univ. (China)
Yiping Huang, Fudan Univ. (China)

Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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