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Proceedings Paper

Index-compatible design of multilayer film for MEMS-type variable optical attenuator
Author(s): Deyan Peng; Guodong Li; Lianwei Wang; Zongshen Lai
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Paper Abstract

The MEMS-type Fabry-Perot cavity is used widely in some kinds of tunable optical MEMS devices. In this paper, the index compatible problem of multi-layer optical film design of Fabry-Perot cavity in the variable optical attenuator (VOA) has been investigated, which is using the transport matrix of optical medium film theoretically. Based on our theoretical model and simulation, our design for the MEMS-type Fabry-Perot cavity has better advantage of the compatibility. At first, it can be adjusted for the different working mode. Secondly, the thickness of the multi-layer film can be restructured according the refractive index of the material available. Finally, it is a self-alignment system, which makes it quite favorable for fiber alignment and procedure of package.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607904
Show Author Affiliations
Deyan Peng, East China Normal Univ. (China)
Guodong Li, East China Normal Univ. (China)
Lianwei Wang, East China Normal Univ. (China)
Zongshen Lai, East China Normal Univ. (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications

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