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Proceedings Paper

Evaluation of the mechanical properties of the materials in MEMS using an optical profiler
Author(s): Haifei Bao; Deren Lu; Minghao Zhao
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Paper Abstract

In this paper an optical method using an optical profiler to evaluate the mechanical properties of the materials in MEMS is presented. As an example, a kind of cantilever plate-mass structure is prepared and measured to determine Young’s modulus of single crystal silicon and the residual stress of the thermal oxide SiO2 on it. An accurate deflection along the surface of the cantilever plate due to the action of residual stress or gravity can be easily obtained. The resolutions of the deflection and the load can be expected to be better than 1 nm and 0.1 μN respectively. The Young’s modulus and the residual stress at 163Gpa and -280Mpa, respectively.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607902
Show Author Affiliations
Haifei Bao, Shanghai Institute of Microsystem and Information Technology, CAS (China)
Deren Lu, Shanghai Institute of Microsystem and Information Technology, CAS (China)
Minghao Zhao, Zhengzhou Univ. (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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