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Proceedings Paper

Study on DC-contact MEMS switches
Author(s): J. J. Chen; H. Z. Wei; M. L. Hu; Zong Shen Lai
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Paper Abstract

This paper presents the design, fabrication and performance of a metal-to-metal contact shunt micro-electro-mechanical (MEMS) switch. The switch was composed of a fixed-fixed Al0.96Si0.04 alloy beam with two pull-down electrodes and a central dc-contact area. The switch was placed in an in-line configuration in a coplanar waveguide transmission line. The best RF performance shows insertion loss of less than 0.3dB and isolation of greater than 35dB for all frequencies up to 10 GHz.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607901
Show Author Affiliations
J. J. Chen, East China Normal Univ. (China)
H. Z. Wei, East China Normal Univ. (China)
M. L. Hu, East China Normal Univ. (China)
Zong Shen Lai, East China Normal Univ. (China)

Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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