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Proceedings Paper

High-isolation contact switch in MEMS phase shifter
Author(s): Wei Li; Yanling Shi; Jian Qing; Ling Jiang; Zheng Ren; Peisheng Xin; Ziqiang Zhu; Zongshen Lai
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Paper Abstract

The design, fabrication and testing of high-isolation contact MEMS switch using AlSi membrane on high-resistivity silicon substrates are described. Simulation result of the switch is analyzed and shows good performance. The measured results show that the isolation of the MEMS switch is better than -30dB at 0.05 - 5GHz. And it has not only low actuation voltage, but also the high reliability. So this contact MEMS switch can be widely used in MEMS phase shifters.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607790
Show Author Affiliations
Wei Li, East China Normal Univ. (China)
Yanling Shi, East China Normal Univ. (China)
Jian Qing, East China Normal Univ. (China)
Ling Jiang, East China Normal Univ. (China)
Zheng Ren, East China Normal Univ. (China)
Peisheng Xin, East China Normal Univ. (China)
Ziqiang Zhu, East China Normal Univ. (China)
Zongshen Lai, East China Normal Univ. (China)

Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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