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Proceedings Paper

The preparation of diamond films on new composite ceramic substrates of diamond and alumina
Author(s): Yue Shen; Yiben Xia; Feng Gu; Qingfeng Su; Jiancheng Zhang
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Paper Abstract

This paper reports the preparation and properties of diamond films deposited on new composite ceramic substrates of diamond and alumina. The influences of the substrates to the properties of diamond films were discussed. The Raman spectra and SEM show that the substrates which prepared by hot pressing sintering were more suitable to deposit high quality diamond films. The main reason why diamond films deposited on composite ceramic substrates without any pre-treatment have good qualities and why the composite ceramic substrate is appropriated to deposit large area diamond films are studied.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607629
Show Author Affiliations
Yue Shen, Shanghai Univ. (China)
Yiben Xia, Shanghai Univ. (China)
Feng Gu, Shanghai Univ. (China)
Qingfeng Su, Shanghai Univ. (China)
Jiancheng Zhang, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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