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Proceedings Paper

Heat-treating effect on the properties of Pb1-xLax(Zr0.4Ti0.6)O3 ferroelectric thin film prepared by a modified sol-gel process
Author(s): Fuwen Shi; Genshui Wang; Xiangjian Meng; Jinglan Sun; Jun-Hao Chu
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Paper Abstract

2 mol% Lanthanum doped lead zirconate titanate Pb(Zr0.4Ti 0.6)O3 ferroelectric thin film were successfully deposited by a modified sol-gel method on(111) Pt/Ti/SiO2/Si(100) substrate, the effect of heat-treatment on the properties of microstructure and ferroelectric was investigated. It is shown that deposited on (111)Pt lead to (111) preferred orientation. The PLZT thin film annealing at 700°C show good ferroelctric properties with a large remnant polarization of 40μ C/cm2, a spontaneous polarization of 75.7μ C/cm2, and a coercive field of 112kV/cm under an electric field of 650kV/cm. The dielectric constant increased with annealing temperature.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607555
Show Author Affiliations
Fuwen Shi, Shanghai Institute of Technical Physics, CAS (China)
Genshui Wang, Shanghai Institute of Technical Physics, CAS (China)
Xiangjian Meng, Shanghai Institute of Technical Physics, CAS (China)
Jinglan Sun, Shanghai Institute of Technical Physics, CAS (China)
Jun-Hao Chu, Shanghai Institute of Technical Physics, CAS (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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