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Proceedings Paper

The nanostructures and optical properties of ZnO films by RF magnetron sputtering
Author(s): Bo Huang; Suntao Wu; Jing Li; Shigang Sun; Zhong-Qun Tian
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Paper Abstract

ZnO nano films were deposited on SiO2/P-Si (100) by RF magnetron sputtering. The interrelationships among growth conditions, crystal structures, and optical properties of the ZnO films were discussed. The reflection spectra of the films reveal that the band-gap of the films is between 3.2-3.3eV. The photoluminescence spectra provide further evidence for the relation between the green emission of ZnO films and the oxygen vacancy or Zn interstitial related defects. The results also demonstrate that the UV emission of ZnO is dependent on the size of the nano-crystallites forming the films. By comparing with the photoluminescence spectra at low temperature, the possible mechanism for this dependent relation was discussed.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607551
Show Author Affiliations
Bo Huang, Xiamen Univ. (China)
Suntao Wu, Xiamen Univ. (China)
Jing Li, Xiamen Univ. (China)
Shigang Sun, Xiamen Univ. (China)
Zhong-Qun Tian, Xiamen Univ. (China)

Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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