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Proceedings Paper

The test of new-type MEMS ammonia-sensitive sensor
Author(s): Lingjie Wang; Jishen Lin
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Paper Abstract

The paper discusses the test of the new type MEMS ammonia sensitive sensor. The sensor has a MOS structure. The sensitivity and stability of the sensor was studied. The paper focuses on the influence of the thin film decorated on the gate. The experimental results showed that the sensor has a good sensitivity and selectivity, that’s because its gate is decorated by mixed metal thin film. And only when the thin film is between 10nm and 30nm, the sensor was most sensitive to NH3.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607481
Show Author Affiliations
Lingjie Wang, Fuzhou Univ. (China)
Jishen Lin, Fuzhou Univ. (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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