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Proceedings Paper

Low-loss microwave coplanar waveguides realized on low-resistivity silicon wafer
Author(s): Yuping Ge; Fangmin Guo; Weiming Wang; Shaoxin Yu; Li Shao; Ziqiang Zhu; Wei Lu
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Paper Abstract

A low-loss microwave Coplanar Waveguides (CPW) was fabricated on Porous Silicon (PS) substrate oxidated and coated with polyimide. The high frequency performance of PS/Oxidated PS (OPS) was observed through fabrication and measurement of CPW on N/P-type PS. The CPW loss was lowered to 0-7.5dB/1.2cm in 0-40GHZ in comparison with quartz and poly-Si/SiO2/high -resistivity Si, and some conclusions were drawn out.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607416
Show Author Affiliations
Yuping Ge, East China Normal Univ. (China)
Fangmin Guo, East China Normal Univ. (China)
Shanghai Institute of Technical Physics, CAS (China)
Weiming Wang, East China Normal Univ. (China)
Shaoxin Yu, East China Normal Univ. (China)
Li Shao, East China Normal Univ. (China)
Ziqiang Zhu, East China Normal Univ. (China)
Wei Lu, Shanghai Institute of Technical Physics, CAS (China)

Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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