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Proceedings Paper

Design and simulation of uncooled bi-material infrared detector
Author(s): Xin Xu; Fangmin Guo; Wei Lu; Shaoxin Yu; Yuping Ge; Ning Li
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Paper Abstract

A new uncooled bi-material microcantilever detector is based on between bi-material large difference in thermal expansion and Young’s modulus, having light, low cost, high sensitivity to radiation, and very matching with silicon IC technologies. A 3D microcantilever detector model had been built and simulated by ANSYS thermal-stress coupled, and gained responses to IR radiation with temperature changes, contributing to maximum deflection of geometry size.

Paper Details

Date Published: 8 December 2004
PDF: 5 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607409
Show Author Affiliations
Xin Xu, East China Normal Univ. (China)
Fangmin Guo, Shanghai Institute of Technical Physics, CAS (China)
East China Normal Univ. (China)
Wei Lu, Shanghai Institute of Technical Physics, CAS (China)
Shaoxin Yu, East China Normal Univ. (China)
Yuping Ge, East China Normal Univ. (China)
Ning Li, Shanghai Institute of Technical Physics, CAS (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications

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