Share Email Print
cover

Proceedings Paper

Failure analysis of MEMS RF cantilevered beam switch
Author(s): Fangmin Guo; Xin Xu; Chengshi Li; Yuping Ge; Jianguo Yu; Peisheng Xin; Rongjin Zhu; Zongshen Lai; Ziqiang Zhu; Wei Lu
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A surface MEMS miniature switch with the cantilevered arm has been made on low resistivity Si substrate. The switch was inserted into a time domain setup and their lifetimes have been characterized as a function of actuated voltage, demonstrating some relationship among lifetime and threshold voltage. The structure of MEMS RF switch is simulated by ANSYS software, doing some failure analysis and discussing difference comparing the experiment.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607393
Show Author Affiliations
Fangmin Guo, East China Normal Univ. (China)
Shanghai Institute of Technical Physics, CAS (China)
Xin Xu, East China Normal Univ. (China)
Chengshi Li, East China Normal Univ. (China)
Yuping Ge, East China Normal Univ. (China)
Jianguo Yu, East China Normal Univ. (China)
Peisheng Xin, East China Normal Univ. (China)
Rongjin Zhu, East China Normal Univ. (China)
Zongshen Lai, East China Normal Univ. (China)
Ziqiang Zhu, East China Normal Univ. (China)
Wei Lu, Shanghai Institute of Technical Physics, CAS (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

© SPIE. Terms of Use
Back to Top