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Proceedings Paper

Plasma-implantation-based surface modification of metals with single-implantation mode
Author(s): X. B. Tian; J. T. Cui; S. Q. Yang; Ricky K. Y. Fu; Paul K. Chu
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Paper Abstract

Plasma ion implantation has proven to be an effective surface modification technique. Its biggest advantage is the capability to treat the objects with irregular shapes without complex manipulation of target holder. Many metal materials such as aluminum, stainless steel, tool steel, titanium, magnesium etc, has been treated using this technique to improve their wear-resistance, corrosion-resistance, fatigue-resistance, oxidation-resistance, bio-compatiblity etc. However in order to achieve thicker modified layers, hybrid processes combining plasma ion implantation with other techniques have been frequently employed. In this paper plasma implantation based surface modification of metals using single-implantation mode is reviewed.

Paper Details

Date Published: 8 December 2004
PDF: 6 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607376
Show Author Affiliations
X. B. Tian, Harbin Institute of Technology (China)
J. T. Cui, Harbin Institute of Technology (China)
S. Q. Yang, Harbin Institute of Technology (China)
Ricky K. Y. Fu, City Univ. of Hong Kong (Hong Kong China)
Paul K. Chu, City Univ. of Hong Kong (Hong Kong China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications

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