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Proceedings Paper

Anisotropic optical properties of ZrO2 films by oblique deposition
Author(s): Jianguo Wang; Jianda Shao; Shuhai Fan; Zhengxiu Fan
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Paper Abstract

The ZrO2 thin films are prepared by oblique deposition. Spectrophotometry yields an obvious anisotropic p-polarized transmittance. On the computation of refractive indices of different incidence angles and polarization states, the anisotropic optical properties are obtained. The refractive indices derived from s-polarized light are around 1.725, but the ones for p-polarized light are from 1.82 to 1.94. The distribution of refractive indices is consistent with the transmittance of s- and p-polarized light. The transmittance of ZrO2 thin films by oblique and normal deposition are compared each other. The results could be qualitative understood from the presence of an inclined column with shape birefringence.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607372
Show Author Affiliations
Jianguo Wang, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Shuhai Fan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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