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Proceedings Paper

Nodule growth in zirconium films prepared by ion beam sputtering
Author(s): Dongping Zhang; HongJi Qi; Jianda Shao; Hongbo He; Zhengxiu Fan
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Paper Abstract

Zirconium films were deposited by ion beam sputtering method. A novel substrate holder was designed to realize the approximately in-situ observation the process of the nodule growth. The method of pre-setting particle seeds on the substrates was used in the film deposition. Optical microscope and SEM were presented in observation the specimen before and after annealing. An interesting growth mode of nodules which different from the reported in science literature was found in our experiment. The molecule dynamics theory and diffusion limited aggregation (DLA) model was presented to analysis this phenomenon.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607335
Show Author Affiliations
Dongping Zhang, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
HongJi Qi, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Hongbo He, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications

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