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Proceedings Paper

Structure and ferroelectric properties of Bi3.25La0.75Ti3O12 and Bi3.25Nd0.75Ti3O12 thin films prepared by an MOD method
Author(s): Jian Hua Ma; Xiang-Jian Meng; Jing-Lan Sun; Tie Lin; Jun-Hao Chu
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Paper Abstract

The structure and ferroelectric properties of Bi3.25 La 0.75Ti3O12 (BLT) and Bi3.25 Nd0.75Ti3O12 (BNT) thin films deposited on (111)Pt/Ti/SiO2/Si substrates using a metalorganic decomposition (MOD) method were investigated. Both the films were polycrystalline structure with the single bismuth-layered phase. The BNT film showed the (117) random orientation, while the BLT film displayed (00l)-preferential orientation. The BNT film showed a larger remnant polarization (~13.8μC/cm2) than the BLT film (~3.5μC/cm2), while both films displayed almost the same value of coercive field. The BNT film had the larger dielectric constant and a litter larger dissipation factor than the BLT film. The superior ferroelectricity of the BNT film was mainly attributed to its (117) random orientation. Furthermore, the BNT film displayed good fatigue endurance up to 109 switching cycles, indicating it was a useful candidate for integrated device applications.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607334
Show Author Affiliations
Jian Hua Ma, Shanghai Institute of Technical Physics, CAS (China)
Xiang-Jian Meng, Shanghai Institute of Technical Physics, CAS (China)
Jing-Lan Sun, Shanghai Institute of Technical Physics, CAS (China)
Tie Lin, Shanghai Institute of Technical Physics, CAS (China)
Jun-Hao Chu, Shanghai Institute of Technical Physics, CAS (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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