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Proceedings Paper

Tunable properties of PbxSr1-xTiO3 thin films
Author(s): Boyu Ni; Dongwen Peng; Wenbiao Wu; Zhongyan Meng
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Paper Abstract

Lead strontium titanate (PbxSr1-xTiO3) thin films with Pb/Sr ration of 10/90, 20/80, 30/70 and 40/60 were deposited on Pt/Ti/SiO2/Si substrates by sol-gel techniques. Both structural and dielectric properties of PST films as a function of Pb/Sr ratios were investigated. PST thin films showed typical polycrystalline structure without preferential orientation. The measured capacitance and tunability systematically increased with the increase in Pb content. Among all the PST thin films, PST (30/70) thin film has the best crystallization and dielectric properties. The dielectric constant, dielectric loss tenability and FOM of the PST (30/&70) film are 376,0.022, 61.0% and 28, respectively.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607283
Show Author Affiliations
Boyu Ni, Shanghai Univ. (China)
Dongwen Peng, Shanghai Univ. (China)
Wenbiao Wu, Shanghai Univ. (China)
Zhongyan Meng, Shanghai Univ. (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications
Junhao Chu; Zongsheng Lai; Lianwei Wang; Shaohui Xu, Editor(s)

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