Share Email Print
cover

Proceedings Paper

The characteristic criterion of the growth of metallic films from discontinuous to continuous
Author(s): Ping Fan; Hong-Ji Qi; Kui Yi; Jian-Da Shao; Zheng-Xiu Fan
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A characteristic criterion of the growth of metallic films from discontinuous to continuous has been proposed. That is, when the electric conductivity σ of thin metallic film equals to 63.2% of the electric conductivity σ of the infinitely thick metallic film, the growth of metallic films come into continuous film. The corresponding equivalent thickness d0 of the characteristic criterion can be thought of as the characteristic thickness of the growth of metal films from discontinuous to continuous. According this characteristic criterion, the characteristic thicknesses of Co films and Cu films have been given. The topography images of Co and Cu films have been observed using atomic force microscopy.

Paper Details

Date Published: 8 December 2004
PDF: 4 pages
Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); doi: 10.1117/12.607271
Show Author Affiliations
Ping Fan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Shenzhen Univ. (China)
Hong-Ji Qi, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Kui Yi, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Jian-Da Shao, Shanghai Institute of Optics and Fine Mechanics, CAS (China)
Zheng-Xiu Fan, Shanghai Institute of Optics and Fine Mechanics, CAS (China)


Published in SPIE Proceedings Vol. 5774:
Fifth International Conference on Thin Film Physics and Applications

© SPIE. Terms of Use
Back to Top