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Proceedings Paper

Automatically high precision manufacturing technology for micro-optic subgroups
Author(s): Thomas Sure; Volker Guyenot; Michael Gerhardt
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Paper Abstract

To realize the image quality of high end objectives, e. g. high NA microscope objectives working in the DUV spectral region the subgroups have to be manufactured with a mechanical precision which is difficult to achieve cost effectively. For high end microscope objectives the accuracy of the diameter of the lens mount must be within 1 µm, the run-out must be met within 1 µm and the distance of the lens vertex relative to the shoulder of the mount must fit within 1 µm. To realize the required precision, today various measurement techniques and production processes are used. Picking up the subgroups on different machining tools and measurement systems will loosen the accuracy. Here, we present the concept and the layout of a new manufacturing tool where we implemented the different measurement techniques in one CNC machining center.

Paper Details

Date Published: 2 May 2005
PDF: 4 pages
Proc. SPIE 10315, Optifab 2005: Technical Digest, 1031505 (2 May 2005); doi: 10.1117/12.605828
Show Author Affiliations
Thomas Sure, Leica Microsystems GmbH (Germany)
Volker Guyenot, Fraunhofer-Institut fur Angewandte Optik und Feinmechanik IOF (Germany)
Michael Gerhardt, OptoTech (Germany)

Published in SPIE Proceedings Vol. 10315:
Optifab 2005: Technical Digest
Robert E. Fischer; Masahide Katsuki; Matthias Pfaff; Kathleen A. Richardson, Editor(s)

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