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Proceedings Paper

Design of surface gratings in photopolymerizable hybrid sol-gel films
Author(s): C. Croutxe-Barghorn; M. Feuillade; O. Soppera; C. Carre
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Paper Abstract

Hybrid organic-inorganic materials based on the sol-gel synthesis of organically modified silicon alkoxides have demonstrated their great potential for optical applications. They offer a high versatility in terms of chemical, physical properties and macroscopic shape molding of the final component. In a first step, hydrolysis and condensation reactions are led along the same way as in classical sol-gel glasses. Partial elaboration of the silicate backbone is thus achieved. Then, free-radical polymerization is proceeded by irradiating the sample under UV or visible light. Finally, the material consists of two crosslinked inorganic and organic networks that are interpenetrated. The present paper focuses on a photolithographic process allowing the generation of relief optical elements without requiring a wet treatment to reveal the latent image. It enables a low cost, simple and quick method for the fabrication of integrated micro-optical components with a spatial frequency up to 250 l/mm. The aim of the present work is to give particular attention to the kinetic aspects of the polymerization of the organic component. The control of the C=C double bonds conversion of acrylate functionalized alkoxides in case of photopolymerization is therefore, an essential issue to tailor material properties. The study also focuses on the influence of physico-chemical parameters that govern the relief generation. Kinetics of surface corrugation point out the importance of strain relaxation, mass-transfer by flowing and organic network formation during the photolithographic process. Some illustrations of the generated diffraction gratings are given.

Paper Details

Date Published: 2 June 2005
PDF: 9 pages
Proc. SPIE 5824, Opto-Ireland 2005: Nanotechnology and Nanophotonics, (2 June 2005); doi: 10.1117/12.605810
Show Author Affiliations
C. Croutxe-Barghorn, Department of Photochemistry, CNRS UMR 7525 (France)
M. Feuillade, Department of Photochemistry, CNRS UMR 7525 (France)
O. Soppera, Department of Photochemistry, CNRS UMR 7525 (France)
C. Carre, Department of Photochemistry, CNRS UMR 7525 (France)


Published in SPIE Proceedings Vol. 5824:
Opto-Ireland 2005: Nanotechnology and Nanophotonics
David Kennedy; John Colreavy; Werner J. Blau, Editor(s)

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