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Proceedings Paper

Development of a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stage
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Paper Abstract

We developed a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stage. This monolithic design features parallelogram four-bar linkages, flexure hinges and piezoelectric stack actuators. The stage is made from single crystal silicon because it has excellent mechanical properties compared to metals, which result in high bandwidth, large work zone and compact size of the stage. Kinematics and dynamics analysis were performed for the design. We also developed microfabrication procedures to make the prototype of the stage. Experiment results show that the mechanical structure of the stage can deliver a 400μm by 400μm square work zone without failing any flexure hinges. With two piezoelectric stack actuators mounted, the stage is able to do open-loop contouring in a 32μm by 32μm work zone with 160V driving voltages applied. The resonation frequencies of the stage are between 1,300 and 1,400Hz.

Paper Details

Date Published: 1 July 2005
PDF: 11 pages
Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); doi: 10.1117/12.605632
Show Author Affiliations
Qing Yao, Univ. of Illinois/Urbana-Champaign (United States)
Placid M. Ferreira, Univ. of Illinois/Urbana-Champaign (United States)
Deepkishore Mukhopadhyay, Univ. of Illinois/Urbana-Champaign (United States)


Published in SPIE Proceedings Vol. 5836:
Smart Sensors, Actuators, and MEMS II
Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu, Editor(s)

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