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Proceedings Paper

Percussion drilling of polyimide using VUV and UV solid state lasers
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Paper Abstract

Percussion drilling of blind holes and vias in Kapton film was investigated using Q-switched solid state lasers operating at UV (355nm) and VUV (266nm) wavelengths. Holes were analyzed using different methods such as scanning electron microscopy (SEM) and surface profilometry. Ablation rates for the two wavelengths are compared. No abrupt thresholds were found and there was no evidence of an incubation effect within the first few pulses. Introducing pauses during the drilling increased the number of shots required for perforation of the film. The effects of fluence on diameter, depth and taper of the holes are presented. Smaller and neater holes are achieved more accurately with a lower fluence. An observed skin effect brought about by long exposure to low fluence VUV laser light is also discussed.

Paper Details

Date Published: 8 June 2005
PDF: 11 pages
Proc. SPIE 5827, Opto-Ireland 2005: Photonic Engineering, (8 June 2005); doi: 10.1117/12.605151
Show Author Affiliations
C. Mullan, National Univ. of Ireland/Galway (Ireland)
D. Ilie, National Univ. of Ireland/Galway (Ireland)
Sebastian Favre, National Univ. of Ireland/Galway (Ireland)
Gerard M. O'Connor, National Univ. of Ireland/Galway (Ireland)
Thomas J. Glynn, National Univ. of Ireland/Galway (Ireland)

Published in SPIE Proceedings Vol. 5827:
Opto-Ireland 2005: Photonic Engineering
Thomas J. Glynn; John T. Sheridan; Brian W. Bowe; Ronan F. O'Dowd; Gerard M. O'Connor; Aidan J.H. Flanagan; Gerard D. O'Sullivan; Gerald Byrne; Jonathan Magee, Editor(s)

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