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Proceedings Paper

A comparative study of channel formation in polymer materials using VUV and UV nano-second laser sources for use in micro-fluidic applications
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Paper Abstract

UV and VUV laser ablation of micro-fluidic circuits for micro-total analysis systems (μTAS) is an alternative to more expensive techniques of LIGA or micro-moulding. The machining of trenches in PS, PC, PMMA (CQ grade and non-CQ grade) was investigated using two Q-switched solid state lasers, one operating at 266nm (fourth harmonic) and another at 355nm (third harmonic). These results were compared with results achieved using a 193nm Excimer laser. The structuring of the channels depends on both the laser wavelength and the target material. A comparison of the process will be presented with respect to the structure quality and efficiency of the process.

Paper Details

Date Published: 3 June 2005
PDF: 12 pages
Proc. SPIE 5825, Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks, (3 June 2005); doi: 10.1117/12.605144
Show Author Affiliations
Sean McGinty, National Univ. of Ireland/Galway (Ireland)
Gerard M. O'Connor, National Univ. of Ireland/Galway (Ireland)
Thomas J. Glynn, National Univ. of Ireland/Galway (Ireland)


Published in SPIE Proceedings Vol. 5825:
Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks
John Gerard McInerney; Harold S. Gamble; Gerald Farrell; David M. Denieffe; Padraig Hughes; R. Alan Moore; Liam Barry, Editor(s)

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