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Proceedings Paper

New technique for obtaining the electroreflectance spectrum: vacuum electroreflectance (Poster Paper)
Author(s): Silvia L. Mioc; Paul M. Raccah; James W. Garland
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Paper Abstract

Vacuum electroreflectance (VER), a new method for performing electroreflectance on a free standing surface, is introduced. In VER, the surface of the sample is in vacuum and does not come in contact with a dielectric or a metal. The sample is interferometrically aligned, and precise positioning is obtained by piezoelectric motors. Cooling to 80 K is accomplished by the Joule-Thompson effect, and temperatures up to 400 K are achieved by resistive heating. Comparison of data obtained at room temperature by VER, photoreflectance (PR), and electrolyte electroreflectance (EER), and at low temperature by VER ad PR on the same GaAs sample is presented. Also, the VER data is compared to the data obtained in air by the newly introduced contactless electroreflectance (CER) technique.

Paper Details

Date Published: 1 July 1992
PDF: 10 pages
Proc. SPIE 1678, Spectroscopic Characterization Techniques for Semiconductor Technology IV, (1 July 1992); doi: 10.1117/12.60467
Show Author Affiliations
Silvia L. Mioc, Univ. of Illinois/Chicago (United States)
Paul M. Raccah, Univ. of Illinois/Chicago (United States)
James W. Garland, Univ. of Illinois/Chicago (United States)


Published in SPIE Proceedings Vol. 1678:
Spectroscopic Characterization Techniques for Semiconductor Technology IV

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