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Proceedings Paper

Raman spectroscopy study of interdiffusion in Si/SiGe superlattices
Author(s): Orest J. Glembocki; Sharka M. Prokes
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Paper Abstract

The use of Raman spectroscopy to study interdiffusion in SiGe/Si superlattices and multilayers has been considered. We have modeled the interdiffusion process using an error function concentration profile and modeled the Raman scattering spectrum as an integration over this profile. The calculation has been compared to experimental data. The Raman spectra were calculated by appropriately averaging over the diffused interface. We find good agreement between the calculated and measured spectra. The Raman spectra are shown to be sensitive to the interfacial profile.

Paper Details

Date Published: 1 July 1992
PDF: 7 pages
Proc. SPIE 1678, Spectroscopic Characterization Techniques for Semiconductor Technology IV, (1 July 1992); doi: 10.1117/12.60450
Show Author Affiliations
Orest J. Glembocki, Naval Research Lab. (United States)
Sharka M. Prokes, Naval Research Lab. (United States)


Published in SPIE Proceedings Vol. 1678:
Spectroscopic Characterization Techniques for Semiconductor Technology IV

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