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Proceedings Paper

In-situ electron spectroscopy studies of interaction between P and GaAs(100) surface
Author(s): Xue Kun Lu; Xiaoyuan Hou; Xunmin Ding; Xun Wang
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Paper Details

Date Published: 1 July 1992
PDF: 9 pages
Proc. SPIE 1678, Spectroscopic Characterization Techniques for Semiconductor Technology IV, (1 July 1992); doi: 10.1117/12.60439
Show Author Affiliations
Xue Kun Lu, Fudan Univ. (China)
Xiaoyuan Hou, Fudan Univ. (China)
Xunmin Ding, Fudan Univ. (China)
Xun Wang, Fudan Univ. (China)


Published in SPIE Proceedings Vol. 1678:
Spectroscopic Characterization Techniques for Semiconductor Technology IV

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