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Proceedings Paper

Direct phase modulating laser diode interferometer for in-process measurement using sinusoidal signal synchronized with the CCD camera's exposure time
Author(s): Xuefeng Zhao; Takamasa Suzuki; Takamasa Masutomi; Osami Sasaki
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Paper Abstract

A disturbance-free sinusoidal phase modulating laser diode interferometer using integrating bucket method is described. Several techniques make it suitable for use in the in-process measurement: the charge-coupled device (CCD) based additive operation on integrating-buckets shares the burden of data processing imposed on the computer; the modulating signal is matched with the CCD camera’s exposure time easily and exactly by using a dedicated waveform generator; the use of high speed shutter function of the CCD camera enables each bucket collection to be insensitive to the noise, while the interference signal’s stability is enhanced with the feedback control during entire measurement time. A surface profile measurement on a diamond-turned aluminum disk was demonstrated to evaluate the performance of this system.

Paper Details

Date Published: 20 January 2005
PDF: 8 pages
Proc. SPIE 5633, Advanced Materials and Devices for Sensing and Imaging II, (20 January 2005); doi: 10.1117/12.603826
Show Author Affiliations
Xuefeng Zhao, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)
Takamasa Masutomi, Niigata Univ. (Japan)
Osami Sasaki, Niigata Univ. (Japan)

Published in SPIE Proceedings Vol. 5633:
Advanced Materials and Devices for Sensing and Imaging II
Anbo Wang; Yimo Zhang; Yukihiro Ishii, Editor(s)

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