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Proceedings Paper

Multiple methods of modeling MEMS
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Paper Abstract

Micro-Electro-Mechanical Systems or MEMS are becoming increasingly important in several optical applications. In particular, devices composed of an array of active micro-optics can be used for wavefront correction, optical switching, and generic digital light control. Whatever the application, it is important for anyone seeking to employ this technology to use computer modeling to predict the performance of the subsystem that incorporates optical MEMS. In this paper we will show how commercially available software can be used to model these systems using several approaches.

Paper Details

Date Published: 19 May 2005
PDF: 9 pages
Proc. SPIE 5798, Spaceborne Sensors II, (19 May 2005); doi: 10.1117/12.603814
Show Author Affiliations
Brien J. Housand, Lambda Research Corp. (United States)
Leo Gardner, Lambda Research Corp. (United States)
G. Groot Gregory, Lambda Research Corp. (United States)


Published in SPIE Proceedings Vol. 5798:
Spaceborne Sensors II
Peter Tchoryk; Brian Holz, Editor(s)

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