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Proceedings Paper

A high-frame-rate DUV-optimized CCD for simultaneous measurements of illumination intensity, polarization amplitude, and polarization direction for very high NA imaging systems
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Paper Abstract

Lincoln Laboratory has designed and fabricated a charge-coupled device (CCD) array capable of imaging both polarization and illumination uniformity. The device consists of an 1107-element linear array of UV-optimized silicon photodiodes read out by a three-stage CCD through a single ~1-MHz output amplifier. This yields an effective clock rate for the whole array of ~1 kHz. Each of the active diode surfaces within the 1107-element array is covered by a UV-opaque layer of polysilicon into which are patterned 140-nm, transmissive sampling slits. The orientation and location of the slits allows simultaneous determination of illumination uniformity, degree and direction of polarization, and polarization uniformity. The device was tested with a 193-nm excimer laser equipped with variably polarized illumination and the theoretical performance of the device was supported by finite-difference time domain optical simulations.

Paper Details

Date Published: 12 May 2004
PDF: 12 pages
Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2004); doi: 10.1117/12.602757
Show Author Affiliations
Roderick R. Kunz, Lincoln Lab., Massachusetts Institute of Technology (United States)
Dennis D. Rathman, Lincoln Lab., Massachusetts Institute of Technology (United States)
Steven J. Spector, Lincoln Lab., Massachusetts Institute of Technology (United States)
Michael K. Rose, Lincoln Lab., Massachusetts Institute of Technology (United States)
Michael Yeung, Boston Univ. (United States)


Published in SPIE Proceedings Vol. 5754:
Optical Microlithography XVIII
Bruce W. Smith, Editor(s)

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