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Proceedings Paper

Technologies and market trends for polymer MEMS in microfluidics and lab-on-chip
Author(s): Geraldine Andrieux; Jean-Christophe Eloy; Eric Mounier
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Paper Abstract

This article presents a synthesis of industrial activity in polymer microcomponents and their use in biological fields. Polymer microtechnologies have emerged in the 90s as a low cost alternative technology to Si and glass micromachining. The launching of the Steag microParts company in 1990 with the FZK Research Center and Pharmacia Biosensor patents, have launched these materials in the MEMS world. Polymers are expected to be increasingly used through the development of microfluidics for bio applications.

Paper Details

Date Published: 22 January 2005
PDF: 5 pages
Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); doi: 10.1117/12.601554
Show Author Affiliations
Geraldine Andrieux, Yole Developpement (France)
Jean-Christophe Eloy, Yole Developpement (France)
Eric Mounier, Yole Developpement (France)


Published in SPIE Proceedings Vol. 5718:
Microfluidics, BioMEMS, and Medical Microsystems III
Ian Papautsky; Isabelle Chartier, Editor(s)

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