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Proceedings Paper

X-ray microscopy for NDE of micro- and nano-structrues (Invited Paper)
Author(s): Steve Wang; Frederick Duewer; Michael Feser; David Scott; Wenbing Yun
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Paper Abstract

X-ray imaging offers a number of unique properties that are favorable for NDE applications, including large penetration depth, elemental specificity, and relatively low radiation damage. While direct-projection type x-ray systems with a few um resolution have been widely deployed, recent advances in x-ray optics and imaging methodology have lead to lens-based x-ray microscopes with better than 60-nm resolution, and with integrated 3D imaging and material analysis capabilities. Used independently or in combination with established techniques based on visible light and electron microscopy, these new high-resolution x-ray systems introduces many attractive new capabilities for studying structures at micrometer to tens-of-nm scale.

Paper Details

Date Published: 9 May 2005
PDF: 9 pages
Proc. SPIE 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III, (9 May 2005); doi: 10.1117/12.601370
Show Author Affiliations
Steve Wang, Xradia, Inc. (United States)
Frederick Duewer, Xradia, Inc. (United States)
Michael Feser, Xradia, Inc. (United States)
David Scott, Xradia, Inc. (United States)
Wenbing Yun, Xradia, Inc. (United States)


Published in SPIE Proceedings Vol. 5766:
Testing, Reliability, and Application of Micro- and Nano-Material Systems III
Robert E. Geer; Norbert Meyendorf; George Y. Baaklini; Bernd Michel, Editor(s)

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