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Proceedings Paper

CAD-integrated system for automated multi-photon three-dimensional micro- and nano-fabrication
Author(s): Ivan B. Divliansky; Gregory Weaver; Michael Petrovich; Toufic Jabbour; Hubert P. Seigneur; Caleb Parnell-Lampen; Amy Thompson; Kevin D. Belfield; Stephen M. Kuebler
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Paper Abstract

Multi-photon three-dimensional micro-/nano-fabrication (3DM) is a powerful technique for creating complex 3D micro-scale structures of the type needed for micro-electromechanical systems (MEMS), micro-optics, and microfluidics. In 3DM high peak-power laser pulses are tightly focused into a medium which undergoes a physical or chemical change following multi-photon excitation at the focal point. Complex structures are generated by serial 3D-patterned exposure within the material volume. To further the application of 3DM to micro-component engineering, we are developing a fully automated and integrated 3DM system capable of creating complex cross-linked polymer structures based on patterns designed in a CAD environment. The system consists of four major components: (1) a femtosecond laser and opto-mechanical system; (2) 3-axis micro-positioner; (3) a computer-controlled fabrication interface; and (4) software for fabrication-path planning. The path-planning software generates a 3DM command sequence based on an object-design input file created using standard commercial CAD software. The 3DM system can be used for start-to-finish design and fabrication of waveguides, 3D photonic crystals, and other complex micro-structures. These results demonstrate a technological path for implementing 3DM as a tool for micro- and nano-optical component manufacture.

Paper Details

Date Published: 22 January 2005
PDF: 8 pages
Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); doi: 10.1117/12.601187
Show Author Affiliations
Ivan B. Divliansky, College of Optics and Photonics, Univ. of Central Florida (United States)
Gregory Weaver, College of Optics and Photonics, Univ. of Central Florida (United States)
Michael Petrovich, College of Optics and Photonics, Univ. of Central Florida (United States)
Toufic Jabbour, College of Optics and Photonics, Univ. of Central Florida (United States)
Hubert P. Seigneur, College of Optics and Photonics, Univ. of Central Florida (United States)
Caleb Parnell-Lampen, College of Optics and Photonics, Univ. of Central Florida (United States)
Amy Thompson, College of Optics and Photonics, Univ. of Central Florida (United States)
Kevin D. Belfield, College of Optics and Photonics, Univ. of Central Florida (United States)
Univ. of Central Florida (United States)
Stephen M. Kuebler, College of Optics and Photonics, Univ. of Central Florida (United States)
Univ. of Central Florida (United States)


Published in SPIE Proceedings Vol. 5720:
Micromachining Technology for Micro-Optics and Nano-Optics III
Eric G. Johnson; Gregory P. Nordin; Thomas J. Suleski, Editor(s)

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