Share Email Print
cover

Proceedings Paper

Contamination removal from EUV multilayer using atomic hydrogen generated by heated catalyzer
Author(s): H. Oizumi; H. Yamanashi; I. Nishiyama; K. Hashimoto; S. Ohsono; A. Masuda; A. Izumi; H. Matsumura
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A rapid, damage-free method of removing carbon contamination from EUV multilayer has been developed that employs atomic hydrogen generated by a heated catalyzer consisting of a W wire. Test samples were prepared by contaminating Mo/Si multilayers with carbon using EB or synchrotron radiation (SR). The insertion of a thermal shield between the catalyzer and a sample prevented radiant heat from the catalyzer from damaging the sample during cleaning. Ex situ XPS measurements and measurements of the thickness of the carbon layer with optical thickness measurement systems showed that the new treatment completely removes carbon from multilayers. The EUV reflectivity of multilayers was measured before and after cleaning to assess any resulting damage. It was found that cleaning changed the reflectivity and the centroid wavelength only marginally, within the measurement error.

Paper Details

Date Published: 6 May 2005
PDF: 8 pages
Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); doi: 10.1117/12.601136
Show Author Affiliations
H. Oizumi, Association of Super-Advanced Electronics Technologies (Japan)
H. Yamanashi, Association of Super-Advanced Electronics Technologies (Japan)
I. Nishiyama, Association of Super-Advanced Electronics Technologies (Japan)
K. Hashimoto, Japan Advanced Institute of Science and Technology (Japan)
S. Ohsono, Japan Advanced Institute of Science and Technology (Japan)
A. Masuda, Japan Advanced Institute of Science and Technology (Japan)
A. Izumi, Japan Advanced Institute of Science and Technology (Japan)
H. Matsumura, Japan Advanced Institute of Science and Technology (Japan)


Published in SPIE Proceedings Vol. 5751:
Emerging Lithographic Technologies IX
R. Scott Mackay, Editor(s)

© SPIE. Terms of Use
Back to Top