Share Email Print
cover

Proceedings Paper

Improvement of homogeneity in large optics made of Corning HPFS fused silica
Author(s): Julie L. Ladison; John E. Maxon
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In large fused silica blanks, typically greater than 225mm in diameter and 40mm thick, recent glass forming improvements have improved the homogeneity in Corning HPFS fused silica by 51%. Overall homogeneity peak to valley values improved from an average 1.4ppm to 0.69ppm. This paper describes the experimental results on homogeneity and birefringence resulting from these Forming improvements.

Paper Details

Date Published: 12 May 2004
PDF: 7 pages
Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2004); doi: 10.1117/12.601036
Show Author Affiliations
Julie L. Ladison, Corning Inc. (United States)
John E. Maxon, Corning Inc. (United States)


Published in SPIE Proceedings Vol. 5754:
Optical Microlithography XVIII
Bruce W. Smith, Editor(s)

© SPIE. Terms of Use
Back to Top