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Proceedings Paper

Hardness, elastic modulus, and fracture toughness bulk properties in Corning calcium fluoride
Author(s): Julie L. Ladison; James J. Price; John D. Helfinstine; William R. Rosch
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Paper Abstract

Knoop and Vickers hardness, Young's Modulus, and fracture toughness measurements were performed on Corning's Code 9575 calcium fluoride in various orientations. Other commercially available sources of calcium fluoride were also measured for comparison of properties. Knoop hardness and elastic properties exhibited a dependence on orientation while no such dependence was observed for Vickers hardness and fracture toughness. The results also indicated that these physical properties were not dependent on the source of the material

Paper Details

Date Published: 12 May 2004
PDF: 10 pages
Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2004); doi: 10.1117/12.601033
Show Author Affiliations
Julie L. Ladison, Corning Inc. (United States)
James J. Price, Corning Inc. (United States)
John D. Helfinstine, Corning Inc. (United States)
William R. Rosch, Corning Inc. (United States)


Published in SPIE Proceedings Vol. 5754:
Optical Microlithography XVIII
Bruce W. Smith, Editor(s)

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