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Proceedings Paper

Considering the flare by introducing the random aberration and non-conserved aberration
Author(s): Masato Shibuya; Nobuaki Watanabe; Hiromi Ezaki; Suezou Nakadate
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Paper Abstract

We have already revealed that wavefront aberration can be categorized into figure and random aberrations and also concluded that the phenomenon of local flare can be explained by the concept of random aberration [1]. In this report, considering the finer undulation of wavefront aberration, we introduce the new concept of non-conserved wavefront aberration. Considering these classified aberrations, we discuss the flare.

Paper Details

Date Published: 12 May 2004
PDF: 12 pages
Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2004); doi: 10.1117/12.600818
Show Author Affiliations
Masato Shibuya, Tokyo Polytechnic Univ. (Japan)
Nobuaki Watanabe, Tokyo Polytechnic Univ. (Japan)
Hiromi Ezaki, Tokyo Polytechnic Univ. (Japan)
Suezou Nakadate, Tokyo Polytechnic Univ. (Japan)


Published in SPIE Proceedings Vol. 5754:
Optical Microlithography XVIII
Bruce W. Smith, Editor(s)

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