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Proceedings Paper

Integrated optics devices for long-ranging surface plasmons: fabrication challenges and solutions
Author(s): Greg A. Mattiussi; Nancy Lahoud; Robert Charbonneau; Pierre Berini
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Paper Abstract

A review of the principal issues related to the fabrication of long-ranging surface plasmon metal waveguides (MWG's) and associated passive and active elements is presented. A discussion of the fabrication requirements for MWG devices is given, followed by examples of various challenges encountered in their fabrication along with associated solutions. The examples cover devices made in a range of materials, including glass, lithium niobate, and PLZT ferroelectrics. Finally, a view on future fabrication strategies is given.

Paper Details

Date Published: 22 January 2005
PDF: 14 pages
Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); doi: 10.1117/12.600788
Show Author Affiliations
Greg A. Mattiussi, Spectalis Corp. (Canada)
Nancy Lahoud, Spectalis Corp. (Canada)
Robert Charbonneau, Spectalis Corp. (Canada)
Pierre Berini, Spectalis Corp. (Canada)
Univ. of Ottawa (Canada)

Published in SPIE Proceedings Vol. 5720:
Micromachining Technology for Micro-Optics and Nano-Optics III
Eric G. Johnson; Gregory P. Nordin; Thomas J. Suleski, Editor(s)

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