Share Email Print
cover

Proceedings Paper

Integrated charge and position sensing for feedback control of electrostatic MEMS
Author(s): Robert C. Anderson; Balasaheb Kawade; Kandiah Ragulan; D. H. S. Maithripala; Jordan M. Berg; Richard O. Gale; W. P. Dayawansa
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Closed-loop control of electrostatic MEMS requires sensing to provide a feedback signal. We present an integrated sensor for charge and position that negligibly affects the open-loop dynamics, does not increase the device footprint, and may be easily fabricated. Numerical finite-element simulation, incorporating a realistic electrostatic field model, and experimental results validate the functionality of the sensor. Simulations show how the sensor may be used in conjunction with nonlinear control to provide full gap operation and improved transient performance. Nonlinear control is often considered too complex for convenient implementation, however the controller presented may be implemented using on-chip, local, integrated circuit components.

Paper Details

Date Published: 17 May 2005
PDF: 12 pages
Proc. SPIE 5765, Smart Structures and Materials 2005: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems, (17 May 2005); doi: 10.1117/12.600634
Show Author Affiliations
Robert C. Anderson, Sandia National Labs. (United States)
Balasaheb Kawade, Texas Tech Univ. (United States)
Kandiah Ragulan, Texas Tech Univ. (United States)
D. H. S. Maithripala, Texas Tech Univ. (United States)
Jordan M. Berg, Texas Tech Univ. (United States)
Richard O. Gale, Texas Tech Univ. (United States)
W. P. Dayawansa, Texas Tech Univ. (United States)


Published in SPIE Proceedings Vol. 5765:
Smart Structures and Materials 2005: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems
Masayoshi Tomizuka, Editor(s)

© SPIE. Terms of Use
Back to Top