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Proceedings Paper

Reinforcement of PDMS masters using silicon plates
Author(s): Cheng Luo; Fang Meng; Yiyun Guo; Xinchuan Liu; Amitha Govindaraju
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Paper Abstract

In this work, a new method was developed to increase the stiffness of PDMS (Polydimethylsiloxane) masters using Si plates, aimed at reducing residual deformations of the PDMS masters induced in the molding process. Using this method, both global and local residual deformations in the reinforced PDMS master have been reduced.

Paper Details

Date Published: 16 May 2005
PDF: 9 pages
Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); doi: 10.1117/12.600324
Show Author Affiliations
Cheng Luo, Louisiana Tech Univ. (United States)
Fang Meng, Louisiana Tech Univ. (United States)
Yiyun Guo, Louisiana Tech Univ. (United States)
Xinchuan Liu, Louisiana Tech Univ. (United States)
Amitha Govindaraju, Louisiana Tech Univ. (United States)


Published in SPIE Proceedings Vol. 5763:
Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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