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Proceedings Paper

The nanostructured Origami 3D fabrication and assembly process for nanopatterned 3D structures
Author(s): Hyun Jin In; William J. Arora; Paul Stellman; Sundeep Kumar; Shao-Horn Yang; Henry I. Smith; George Barbastathis
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Paper Abstract

Nanostructured Origami 3D Fabrication and Assembly Process is a method of manufacturing 3D nanostructured devices using exclusively 2D micro- and nanofabrication techniques. The origami approach consists of first patterning a large 2D membrane and then folding the membrane along predefined regions to obtain the final 3D configuration. We report on the materials, actuation, and modeling aspects of building an origami structure. Experimental results from fabricated devices as well as future applications of the technique are also presented.

Paper Details

Date Published: 16 May 2005
PDF: 12 pages
Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); doi: 10.1117/12.600304
Show Author Affiliations
Hyun Jin In, Massachusetts Institute of Technology (United States)
William J. Arora, Massachusetts Institute of Technology (United States)
Paul Stellman, Massachusetts Institute of Technology (United States)
Sundeep Kumar, Massachusetts Institute of Technology (United States)
Shao-Horn Yang, Massachusetts Institute of Technology (United States)
Henry I. Smith, Massachusetts Institute of Technology (United States)
George Barbastathis, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 5763:
Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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