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Proceedings Paper

Recent advances in electrostatic microactuators for mirror steering
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Paper Abstract

The design and fabrication of electrostatic actuators for micro-mirror systems in telecommunications, scanning, and display applications has advanced enormously over the past few years. These advances were largely stimulated by the telecommunication bubble of the early 2000's. Early micro-mirror systems utilized parallel plate actuation schemes that suffered from inherent pull-in stabilities and required high operation voltages of several hundred Volts. The continuous need for micro-mirror systems that deflect at high angles with low voltage drives (< 50 V) have resulted in a number of solutions. Innovative techniques such as the utilization of parametric analog torque amplification, raised side electrodes that suppress pull-in and magnify torque, high energy density vertical comb drives, and mechanical motion multiplication schemes all contribute toward these goals. This paper reviews recent progress in this area and discusses current technical challenges.

Paper Details

Date Published: 22 January 2005
PDF: 13 pages
Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); doi: 10.1117/12.600087
Show Author Affiliations
Carlos H. Mastrangelo, Corning Inc. (United States)


Published in SPIE Proceedings Vol. 5719:
MOEMS and Miniaturized Systems V
Ayman El-Fatatry, Editor(s)

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