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Proceedings Paper

Laser micromachining techniques for industrial MEMS applications
Author(s): Heather J. Booth; Charles E. Abbott; Ric M. Allott; Karl L. Boehlen; Jim Fieret; Jako Greuters; Paul Trimble; James Pedder
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Paper Abstract

Pulsed laser sources are widely used for the micro-processing of materials from the structuring and patterning of surfaces to the direct machining of devices. This paper discusses laser micro-processing techniques for the fabrication of microstructures with high accuracy and precision. Techniques discussed include laser mask projection techniques and direct beam micromachining using galvo-scanners and high precision motion stages, with a variety of different lasers. Examples of the application of these techniques to the manufacture of MEMS and MOEMS devices are discussed.

Paper Details

Date Published: 12 April 2005
PDF: 10 pages
Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); doi: 10.1117/12.599414
Show Author Affiliations
Heather J. Booth, Exitech Ltd. (United Kingdom)
Charles E. Abbott, Exitech Ltd. (United Kingdom)
Ric M. Allott, Exitech Ltd. (United Kingdom)
Karl L. Boehlen, Exitech Ltd. (United Kingdom)
Jim Fieret, Exitech Ltd. (United Kingdom)
Jako Greuters, Exitech Ltd. (United Kingdom)
Paul Trimble, Exitech Ltd. (United Kingdom)
James Pedder, Imperial College London (United Kingdom)

Published in SPIE Proceedings Vol. 5713:
Photon Processing in Microelectronics and Photonics IV
Jim Fieret; David B. Geohegan; Friedrich G. Bachmann; Willem Hoving; Frank Träger; Peter R. Herman; Jan J. Dubowski; Tatsuo Okada; Kunihiko Washio; Yongfeng Lu; Craig B. Arnold, Editor(s)

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