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Proceedings Paper

Precision carbon nanotube tip for critical dimension measurement with atomic force microscope
Author(s): B. C. Park; K. Y. Jung; J. Hong; W. Y. Song; B.-h. O; J. A. Kim
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Paper Abstract

Precision carbon nanotube (P-CNT) tip for atomic force microscope (AFM) was fabricated where CNT orientation and length is controlled within the precision of 1 degree and 300 nm, respectively. The orientation, diameter and length of CNT tip are crucial factors for faithful profiling of surface patterns. With a nano-manipulation while viewing scanning electron microscope live image followed by focused ion beam process, P-CNT tip could be made. P-CNT tip acts as a normal CNT tip without FIB process. Further it maintains the elasticity. P-CNT tip can, in principle, enter the trench or hole less than 70 nm, which is impossible with the current state-of-the-art silicon tip for CD-AFM. Flaring the CNT end would potentially make possible the AFM-based sub-70 nm CD metrology for these structures.

Paper Details

Date Published: 10 May 2005
PDF: 8 pages
Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); doi: 10.1117/12.599245
Show Author Affiliations
B. C. Park, Korea Research Institute of Standards and Science (South Korea)
K. Y. Jung, Creative Nano Instrument (South Korea)
J. Hong, Creative Nano Instrument (South Korea)
W. Y. Song, Inha Univ. (South Korea)
B.-h. O, Inha Univ. (South Korea)
J. A. Kim, Korea Research Institute of Standards and Science (South Korea)


Published in SPIE Proceedings Vol. 5752:
Metrology, Inspection, and Process Control for Microlithography XIX
Richard M. Silver, Editor(s)

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