Share Email Print
cover

Proceedings Paper

A super-precision evaluation method of ultra-low expansion glasses using the line-focus-beam ultrasonic material characterization system
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A super-precision evaluation method of the coefficient of thermal expansion (CTE) of ultra-low expansion glasses was developed using the line-focus-beam ultrasonic material characterization (LFB-UMC) system. Evaluation was demonstrated for TiO2-SiO2 glass. The sensitivity and resolution in the velocity measurement of leaky surface acoustic waves (LSAWs) in CTE were estimated to be 4.40 (ppb/K)/(m/s) and ±0.77 ppb/K for ±2σ (σ: standard deviation) at 225 MHz. LSAW velocity differences caused by different TiO2 concentrations and distributions or striae in the specimens were successfully detected and evaluated, providing two-dimensional information under the nondestructive and noncontact measurement condition. This ultrasonic method is much more accurate than conventional methods, for evaluating CTE on the surface of ultra-low-expansion glass materials needed for extreme ultra-violet lithography (EUVL) systems.

Paper Details

Date Published: 10 May 2005
PDF: 5 pages
Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); doi: 10.1117/12.599160
Show Author Affiliations
Jun-ichi Kushibiki, Tohoku Univ. (Japan)
Mototaka Arakawa, Tohoku Univ. (Japan)
Yuji Ohashi, Tohoku Univ. (Japan)
Kouji Suzuki, Tohoku Univ. (Japan)
Takahisa Maruyama, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 5752:
Metrology, Inspection, and Process Control for Microlithography XIX
Richard M. Silver, Editor(s)

© SPIE. Terms of Use
Back to Top