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Proceedings Paper

Industrial applications of ultrahigh precision short-pulse laser processing
Author(s): Xinbing Liu
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Paper Abstract

Short-pulse lasers of femtosecond and picosecond durations are used in ultrahigh precision processing of optical, electronic, and micro-mechanical devices. In this paper we discuss the fabrication of high quality photonic crystal band-pass filters with femtosecond laser pulses. We also discuss the parallel processing of inkjet nozzles with a picosecond laser. A laser milling algorithm and a high accuracy beam scanner allows the formation of precisely shaped holes as inkjet nozzles, and an efficient diffractive beam splitter allows the simultaneous drilling of many hundreds of holes for low cost manufacturing.

Paper Details

Date Published: 12 April 2005
PDF: 15 pages
Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); doi: 10.1117/12.599113
Show Author Affiliations
Xinbing Liu, Panasonic Technologies Co. (United States)


Published in SPIE Proceedings Vol. 5713:
Photon Processing in Microelectronics and Photonics IV
Jim Fieret; Peter R. Herman; Tatsuo Okada; Craig B. Arnold; David B. Geohegan; Frank Träger; Jan J. Dubowski; Friedrich G. Bachmann; Willem Hoving; Kunihiko Washio; Yongfeng Lu, Editor(s)

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