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Proceedings Paper

A convenient method to measure the quantity of the acid generated by PAGs and acid amplifiers
Author(s): Liyuan Wang; Zhanxing Chu; Liying Sheng
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Paper Abstract

A convenient method was set up to measure the amounts of acid generated by PAGs and acid amplifiers based on the UV absorbance change of bromophenol blue aqueous solution with the addition of acid. The acid generating property of three different kinds of PAGs and acidolysis property of two 1-substituted cis-1,2-cyclohexanediol monosulfonates were investigated and discussed with this method. The measurements were performed in aqueous solution.

Paper Details

Date Published: 4 May 2005
PDF: 8 pages
Proc. SPIE 5753, Advances in Resist Technology and Processing XXII, (4 May 2005); doi: 10.1117/12.599107
Show Author Affiliations
Liyuan Wang, Beijing Normal Univ. (China)
Zhanxing Chu, Beijing Normal Univ. (China)
Liying Sheng, Beijing Normal Univ. (China)

Published in SPIE Proceedings Vol. 5753:
Advances in Resist Technology and Processing XXII
John L. Sturtevant, Editor(s)

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