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Proceedings Paper

High-performance sensor platform based on electroactive polymers
Author(s): Zhimin Li; Suiqiong Li; Z.-Y. Cheng
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Paper Abstract

The performance of new biosensor design -- Micro-ElectroMechanical Diaphragm (MEMD) -- made from PVDF piezoelectric polymer is reported. The resonant frequencies changing with featured size of MEMD are characterized. The resonant behavior in liquid media shows that the damping effect of MEMD is lower than that of MC. Yeast cell detection demonstrated the feasibility of using this platform as biosensor in real time detection. Finally, the preliminary study on microelectronic fabrication of MEMD is presented.

Paper Details

Date Published: 16 May 2005
PDF: 8 pages
Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); doi: 10.1117/12.598854
Show Author Affiliations
Zhimin Li, Auburn Univ. (United States)
Suiqiong Li, Auburn Univ. (United States)
Z.-Y. Cheng, Auburn Univ. (United States)


Published in SPIE Proceedings Vol. 5763:
Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
Vijay K. Varadan, Editor(s)

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