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Proceedings Paper

Applications of an electron-based EUV source: table-top grazing incidence reflectometer and imaging with a Schwarzschild objective
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Paper Abstract

Two applications of an electron-based EUV-tube are presented: the set up of a grazing incidence EUV reflectometer with high reproducibility and accuracy, and our works towards the realization and application of a Schwarzschild objective for EUV imaging. Both applications benefit form the use of the table-top EUV-source, which is debris-free, long-term stable, and compact.

Paper Details

Date Published: 6 May 2005
PDF: 6 pages
Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); doi: 10.1117/12.598743
Show Author Affiliations
U. Hinze, Laser Zentrum Hannover e.V. (Germany)
A. Egbert, Laser Zentrum Hannover e.V. (Germany)
B. Chichkov, Laser Zentrum Hannover e.V. (Germany)


Published in SPIE Proceedings Vol. 5751:
Emerging Lithographic Technologies IX
R. Scott Mackay, Editor(s)

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