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Proceedings Paper

Performance of kilowatt-class laser modules in scaling up laser produced plasma (LPP) EUV source
Author(s): Samir Ellwi; Andrew Comley; Nick Hay; Ian Henderson; Michael Brownell
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Paper Abstract

Powerlase has made significant steps forward in developing reliable and cost-effective, kilowatt-class laser modules with short pulse duration and small footprint, for use as EUV drivers. These characteristics in parallel to EUV target requirements are essential for the generation of 115W of in-band EUV power at the intermediate focus. These laser modules can be coupled to the EUV target by using our flexible spatial and temporal multiplexing approach in order to scale up the laser average power on target. The multiplexing method developed by Powerlase is modular and optimised for maximum EUV collection angle. To further this goal we are currently evaluating target materials such as xenon in various phases and forms and also have a programme in place to investigate suitable tin targets.

Paper Details

Date Published: 6 May 2005
PDF: 7 pages
Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); doi: 10.1117/12.598721
Show Author Affiliations
Samir Ellwi, Powerlase Ltd. (United Kingdom)
Andrew Comley, Powerlase Ltd. (United Kingdom)
Nick Hay, Powerlase Ltd. (United Kingdom)
Ian Henderson, Powerlase Ltd. (United Kingdom)
Michael Brownell, Powerlase Ltd. (United Kingdom)

Published in SPIE Proceedings Vol. 5751:
Emerging Lithographic Technologies IX
R. Scott Mackay, Editor(s)

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