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Proceedings Paper

Bottom anti-reflective coatings for 193-nm bilayer system
Author(s): Takahiro Sakaguchi; Tomoyuki Enomoto; Yasuyuki Nakajima
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Paper Abstract

The suitable high performances Organic Bottom Anti-Reflective Coatings (Organic BARCs) for 193nm Bilayer system, NCA900 series, were developed. Using CF4 gas as etchant, the etching rate of NCA900 series were 0.87 times slower than that of conventional 193nm photoresists. With NCA900 series, the reflectivity was less than 1% at over 300nm BARC thickness on polysilicon, silicon oxide and silicon nitride. Using conventional 193nm photoresist, 80nm L/S (1:1) patterns with 0.5-micron DOF were observed on NCA900 series. NCA900 series showed the excellent litho performance and coating property. This paper presents the development of BARCs for 193nm Bilayer system.

Paper Details

Date Published: 4 May 2005
PDF: 8 pages
Proc. SPIE 5753, Advances in Resist Technology and Processing XXII, (4 May 2005); doi: 10.1117/12.598715
Show Author Affiliations
Takahiro Sakaguchi, Nissan Chemical Industries, Ltd. (Japan)
Tomoyuki Enomoto, Nissan Chemical Industries, Ltd. (Japan)
Yasuyuki Nakajima, Nissan Chemical Industries, Ltd. (Japan)


Published in SPIE Proceedings Vol. 5753:
Advances in Resist Technology and Processing XXII
John L. Sturtevant, Editor(s)

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